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Entegris brings technologies and competencies together in the LiquidLens™ UPW purification system to enable immersion lithography process advancements. The new high-flow system ensures ultrapure, consistent water quality to preserve optic's life by controlling contaminants at the point of use such as dissolved gases, micro bubbles and particles. It also maintains maximum temperature control by incorporating the pHasor® X heat exchanger, which provides optimum heat transfer while preserving absolute fluid purity and the pHasor® II membrane contactor to ensure the process water is free of bubbles while maintaining absolute purity.