Industries

Material purity and compatibility with process equipment and substrates are two critical factors in the continued advancement of HBLED (high brightness light emitting diodes) technologies. Entegris purification and filtration products enable the manufacturing HBLEDs with the highest photoluminescence peaks and luminous efficiencies while our 30+ years of wafer shipping experience allows us to design the ultimate protection for these critical substrates.

Purification and Filtration

Entegris purification and filtration products enable the manufacturing of High Brightness Light Emitting Diodes (HBLED) with the highest photoluminescence peaks and luminous efficiencies. The purity of the process gases (H₂, N₂, NH₃) reflects directly on the photoluminescence performance, resulting in brighter lights. Entegris has a full range of point-of-use purification, filtration and diffuser products along with system scale purification solutions for HBLED manufacturing environments.

Substrate Handling

Demand for compound semiconductor substrates such as Sapphire, Silicon Carbide, Gallium Arsenide, Indium Phosphide and Gallium Nitride continues to expand. These substrates have traditionally used the same shipping products as silicon wafers. This made economical sense as the quantity of silicon shipped is much higher and there were no known material compatibility issues. However, a number of compound semiconductor substrate manufacturers have reported haze on substrates stored in traditional silicon type shippers, ultimately causing epitaxial failures. To address this potential yield issue, Entegris has developed new multiple wafer shippers with ultra-low silicon compound outgassing specifically for the compound semiconductor market.