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Guardian™ Filters

Multi-use UPE and PTFE liquid filters

Developed from the Mykrolis® contamination control technologies, each Guardian™ liquid filter provides a cost-effective solution to a variety of chemical filtration challenges. Featuring both UPE and PTFE membrane technology, the Guardian family is ideal for high-pH solutions as well as copper and nickel plating applications.
Guardian™ AT Filters
Hydrophobic membrane for ultra-high purity chemicals
  • Ideal for higher temperature applications
  • All-fluoropolymer materials of construction provide a broad range of chemical compatibility. Suitable for a variety of chemicals and solvents
  • Highly retentive hydrophobic PTFE membrane made of Telfon® fluoropolymer resin provides excellent removal of small, critical-size particles to ensure low particle counts in chemical delivery systems
  • ATX: Large membrane surface area to deliver high flow rates at minimal pressure drop
Guardian™ DEV Filters
Low-cost solution for KOH and TMAH based developer solution and other high pH chemical filtration applications
  • Patented hydrophilic UPE membrane spontaneously wets to enable rapid system startup
  • All polyethylene construction provides excellent chemical compatibility and long lifetime in a cost-effective device
Guardian™ ECD Cartridge Filters
Hydrophilic, high-flow inert membrane with excellent flow/retention properties, ideal solution for wet cleans and CuECD
  • Provide excellent chemical compatibility, downstream chemical cleanliness, reduced system startup times and long lifetime
  • Highly hydrophilic surfaces reduce the potential for microbubble formation
  • High-flow asymmetric membrane delivers excellent performance while minimizing system pressure drop
  • Non-interactive surfaces will not react with typical plating additives and related process chemistries – ensures ultimate process protection
Guardian™ Plus HPM Cartridge Filters
For use in ammonium hydroxide and TMAH, copper plating solutions, low-temperature organic resist strippers (without peroxide) and similar chemistries
  • HPM cartridge filters provide nearly double the membrane area in a standard ATX style disposable filter design
  • High-flow membrane with ultra-large filtration area provides rapid particle removal and microbubble control for faster bath startup and system qualification